OSEE SQM
Non-Contact Surface Inspection System
Optically Stimulated Electron Emission (OSEE) is a unique technique for non-invasive inspection of surfaces for molecular contamination. The OSEE SQM tool utilizes ultraviolet radiation to induce electron emission from a surface, resulting in a small current detected by the OSEE SQM tool. Electron emission is dependent on the substrate's surface chemistry; hence the electron emission characteristics will change with the presence of a contaminant on the surface, generally by attenuating the signal. This system can be used for many different types of surface inspection/verification applications. Examples include: testing surface cleanliness prior to adhesive bonding; development of pre-weld cleaning/surface preparation methodology; inspection of surfaces for fingerprints; inspection of graphite/epoxy skins on aluminum-core honeycomb sandwich panels; detection of corrosive electrolyte on battery surface and development of battery cleaning procedure; and verification of plasma-etch treatment of an elastomeric material.
The OSEE SQM tool will optimize any cleaning process by evaluating how the surface cleanliness is affected by the CO2 cleaning and surface modification processes and optimize cleaning process parameters to ensure that parts have been properly cleaned and treated. With this tool, you can establish a quantitative measure of the “Acceptable Level of Cleanliness” prior to the next process step or operation. Moreover you can monitor the cleaning process on an on-going basis to assure that the established level of cleanliness is being achieved consistently. The OSEE SQM tool can detect organic and/or inorganic surface contamination and replaces the water break test with a quantitative measure of surface cleanliness. Finally, OSEE SQM tools are available as stand-alone bench top inspection systems or integration modules for production lines and tools utilizing our CO2 process technologies.
Example Applications
- Surface cleanliness
- Thin film analysis
- Chemical changes on surfaces
